Patent Application Number: 2005289781
Filing Date: September 21, 2005Priority Date: September 28, 2004
Inventors: S. Jonathan Wang, Terry E. McMahon, Gregory T. Hindman, Dennis W. Tom, Simon Dodd, Frank R. Bryant, Richard Todd Miller
Applicants: Hewlett-Packard Development Company, L.P.
View Prior Art for Claim 1

A semiconductor structure, comprising: a substrate comprising a first surface; a first insulative material disposed on at least a portion of the first surface, the first insulative material comprising a plurality of openings forming a path to the first surface; a first conductive material disposed on the first insulative material, the first conductive material being disposed so that the plurality of openings are substantially free of the first conductive material; a second insulative material disposed on the first conductive material and portions of the first insulative material, the second insulative material being disposed so that the plurality of openings are substantially free of the second insulative material; and a second conductive material being disposed on second insulative material and within plurality of openings so that some of the second conductive material disposed upon the second insulative material is in electrical contact with the substrate.

Submitted by: Susan MurrayLast updated: over 2 years ago
Patent/Application # 5314841
Description
A method of having a frontside contact to a SOI wafer is described. Before any device processing steps a trench is etched through the SOI layers to the substrate. This trench is maintained during device processing and opened during source/drain implantation. At metallization an ohmic contact is made to the substrate.
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Submitted by: Susan MurrayLast updated: over 2 years ago
Patent/Application # 4732801
Description
A structure and method for fabricating the structure, which includes a layer containing a refractory metal and a substrate to which the refractory metal-containing layer does not strongly adhere, there being a thin bonding layer between the substrate and the refractory metal-containing layer for providing good adherence between the refractory metal-containing layer and the substrate.
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